Title :
Numerical study on scattering of Rayleigh wave by silicon slider projections for SAW motor
Author :
Miyazaki, Yoshito ; Shigematsu, Takashi ; Kurosawa, Minoru Kuribayashi ; Ishigami, Youhei
Author_Institution :
Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
To reduce the driving power of SAW motors, an energy circulation driving method has been proposed and demonstrated. For the energy circulation drive, forward scattering beneath a silicon slider was found to be a problem, due to phase shift relationships. To investigate what phenomena mainly affect the phase shift, several cases of numerical simulation were carried out using the finite element method. It was found that a phase shift close to experimental results was obtained only in the case of slip and takeoff boundary conditions. The phase shift was around 120 degrees.
Keywords :
Rayleigh waves; acoustic wave scattering; surface acoustic wave devices; FEM; Rayleigh wave scattering; SAW motor; energy circulation drive; finite element method; reduction driving power; silicon slider projections; Acoustic scattering; Acoustic transducers; Acoustic waves; Finite element methods; Numerical simulation; Radio frequency; Rayleigh scattering; Silicon; Stators; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418031
