Title :
Single crystal ultrasonic motor for cryogenic actuations
Author :
Jiang, X.N. ; Rehrig, P.W. ; Hackenberger, W.S. ; Dong, S. ; Viehland, D.
Author_Institution :
TRS Technol., Inc., State College, PA, USA
Abstract :
A novel single crystal piezomotor is presented for large stroke, high precision, cryogenic actuation with the capability of position set-hold at power-off. Single crystal linear motors with/without screw are prototyped and characterized at both room and cryogenic temperatures. Stroke of >10 mm, step resolution ∼20 nm, response time ∼2 ms, and driving voltage of 60 Vp-p were obtained with the prototypes. The linear motor without screw operated successfully in a liquid nitrogen environment (77 K).
Keywords :
cryogenics; linear motors; piezoelectric actuators; ultrasonic motors; 60 V; 77 K; cryogenic actuation; driving voltage; linear motors; liquid nitrogen environment; position set-hold; response time; single crystal piezomotor; single crystal ultrasonic motor; step resolution; Ceramics; Cryogenics; Educational institutions; Fasteners; Ferroelectric materials; Materials science and technology; Piezoelectric actuators; Prototypes; Stators; Temperature;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418034