Design of functional devices with resonant filter with a simple sonic crystal structures

Author

Kaneshiro, Chinami ; Ozaki, Manabu ; Koh, Keishin ; Hohkawa, Kohji

Author_Institution

Dept. of Electr. & Electron. Eng., Kanagawa Inst. of Technol., Japan

Volume

3

fYear

2004

fDate

23-27 Aug. 2004

Firstpage

2283

Abstract

In this paper, we study propagation characteristics of surface acoustic wave (SAW) in structural array. We use focus ion beam (FIB) lithography as a fabrication process of structural array. We fabricated test devices with the structural array formed by metal deposition and etching by using the FIB process, respectively, in order to investigate SAW propagation. The experimental results show the stop-band characteristics and the pass-band characteristics. We try to clarify the feasibility of the SAW functional devices with the structural array, such as an opto-acoustic integrated device.

Keywords

acoustic arrays; acoustic wave propagation; acousto-optical filters; focused ion beam technology; sputter etching; surface acoustic wave resonator filters; FIB lithography; SAW propagation; etching; focus ion beam lithography; functional devices; metal deposition; opto-acoustic integrated device; pass-band characteristics; resonant filter; sonic crystal structures; stop-band characteristics; structural array; surface acoustic wave; Acoustic arrays; Acoustic propagation; Acoustic waves; Fabrication; Filters; Ion beams; Lithography; Resonance; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2004 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-8412-1

Type

conf

DOI

10.1109/ULTSYM.2004.1418296

Filename

1418296