DocumentCode
432376
Title
The creation of the narrow electron and ion beams for a modification of a surface in nanometric scale
Author
Golubev, O.L. ; Shrednik, V.N.
Author_Institution
A.F. Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Polytekhnicheskaya 26, 194021 St. Petersburg, Russia
Volume
1
fYear
2004
fDate
Sept. 27 2004-Oct. 1 2004
Firstpage
48
Lastpage
50
Abstract
The methods of creation of the point sources of electrons and ions with localization of emission in a small angle based on field electron emission and field evaporation are considered. Examples of creation of such sources with use of emitters from pure metals, alloys and complex multicomponent compounds are given. Application of all described methods in a combination to a variety of materials of emitters enabler to create a great set of the point sources of the charged particles with various properties.
Keywords
Atomic beams; Electron beams; Electron emission; Hafnium; Ion beams; Microscopy; Rough surfaces; Surface roughness; Temperature dependence; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
Conference_Location
Yalta, Crimea
ISSN
1093-2941
Print_ISBN
0-7803-8461-X
Type
conf
DOI
10.1109/DEIV.2004.1418597
Filename
1418597
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