DocumentCode
432421
Title
Measurement of total ion flux in vacuum are discharges
Author
Anders, A. ; Oks, E.M. ; Yushkov, G.Yu. ; Brown, I.G.
Author_Institution
Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
Volume
1
fYear
2004
fDate
Sept. 27 2004-Oct. 1 2004
Firstpage
272
Lastpage
275
Abstract
A vacuum arc ion source was modified allowing us to collect ions from arc plasma streaming through an anode mesh. The mesh had a geometric transmittance of 60%, which was taken into account as a correction factor. The ion current from twenty-two cathode materials was measured at an arc current of 100 A. The ion current normalized by the arc current was found to depend on the cathode material, with values in the range from 5% to 11%. The normalized ion current is generally greater for light elements than for heavy elements. The ion erosion rates were determined from values of ion current and ion charge states, which were previously measured in the same experimental system. The ion erosion rates range from 12-94 μg/C.
Keywords
Arc discharges; Atomic measurements; Cathodes; Current measurement; Ion sources; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
Conference_Location
Yalta, Crimea
ISSN
1093-2941
Print_ISBN
0-7803-8461-X
Type
conf
DOI
10.1109/DEIV.2004.1418658
Filename
1418658
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