• DocumentCode
    432421
  • Title

    Measurement of total ion flux in vacuum are discharges

  • Author

    Anders, A. ; Oks, E.M. ; Yushkov, G.Yu. ; Brown, I.G.

  • Author_Institution
    Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
  • Volume
    1
  • fYear
    2004
  • fDate
    Sept. 27 2004-Oct. 1 2004
  • Firstpage
    272
  • Lastpage
    275
  • Abstract
    A vacuum arc ion source was modified allowing us to collect ions from arc plasma streaming through an anode mesh. The mesh had a geometric transmittance of 60%, which was taken into account as a correction factor. The ion current from twenty-two cathode materials was measured at an arc current of 100 A. The ion current normalized by the arc current was found to depend on the cathode material, with values in the range from 5% to 11%. The normalized ion current is generally greater for light elements than for heavy elements. The ion erosion rates were determined from values of ion current and ion charge states, which were previously measured in the same experimental system. The ion erosion rates range from 12-94 μg/C.
  • Keywords
    Arc discharges; Atomic measurements; Cathodes; Current measurement; Ion sources; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources; Vacuum arcs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
  • Conference_Location
    Yalta, Crimea
  • ISSN
    1093-2941
  • Print_ISBN
    0-7803-8461-X
  • Type

    conf

  • DOI
    10.1109/DEIV.2004.1418658
  • Filename
    1418658