Title :
Wide-range RF variable inductor on Si CMOS chip with MEMS actuator
Author :
Sugawara, Hirotaka ; Yoshihara, Yoshiaki ; Ito, Hiroyuki ; Okada, Kenichi ; Masu, Kazuya
Keywords :
Actuators; CMOS technology; Circuits; Electrodes; Inductance; Magnetic flux; Micromechanical devices; Radio frequency; Spirals; Thin film inductors;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
