Wide-range RF variable inductor on Si CMOS chip with MEMS actuator

Author

Sugawara, Hirotaka ; Yoshihara, Yoshiaki ; Ito, Hiroyuki ; Okada, Kenichi ; Masu, Kazuya

Volume

fYear

2004

fDate

14-14 Oct. 2004

Firstpage

701

Lastpage

704

Keywords

Actuators; CMOS technology; Circuits; Electrodes; Inductance; Magnetic flux; Micromechanical devices; Radio frequency; Spirals; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2004. 34th European

Conference_Location

Amsterdam, The Netherlands

Print_ISBN

1-58053-992-0

Type

Filename

1418914

Link To Document