Characterization and Modeling of Photostriction in Silicon Cantilevers Fabricated on Silicon-on-Insulator Substrates

Photostriction-based all-optical actuation of silicon microcantilevers has been investigated through experimental characterization of structures fabricated on silicon-on-insulator substrates, and through numerical modeling and analysis of their semiconductor device and micromechanical characteristics. Since the pressure coefficient of the bandgap is negative in Si, photostriction-induced photoactuation in Si-based cantilevers was evident as upward mechanical defections (away from the substrate) in response to pulsed laser illumination on the cantilevers´ top surface, which is in contrast to the downward deflections typical of photothermal effects. For the numerical modeling of photostriction induced effects, carrier lifetime and excess-carrier concentrations were determined from transient photoconductance measurements. The experimentally determined parameters were then employed to simulate carrier-density profiles across the modeled structure. The modeled cantilever deflections were found to be in excellent agreement with experimentally determined deflections. It is also shown that 100-μm-long Si cantilevers were deflected by up to 10 nm, and generated a force of 0.14 nN, when optically actuated by a 405-nm laser power density of 400 W/cm².