A novel approach to temperature uniformity for thermal process

Uniform temperature control of heating plate with a wide thermal conduction area is required in many industrial application fields. In this paper, a novel approach to uniformity of temperature on heating plate is proposed. The main idea of the proposed method is to control the average and gradient temperatures on the surface in order to suppress the thermal interaction by the heater. The temperature on the heating plate is uniformed not only in steady state but also in transient state. In order to confirm the effectiveness of the proposed method, some experimental results are shown and evaluated.