DocumentCode :
434088
Title :
Microscopic studies to surfaces film SIO/sub 2/ with admixture of carbon
Author :
Troyian, P.E. ; Sacharov, Yu.V. ; Shigalskii, A.A. ; Makruchin, A.S.
fYear :
2004
fDate :
21-24 Sept. 2004
Firstpage :
215
Lastpage :
215
Abstract :
In this work are considered microscopic studies to surfaces film SiO2 with admixture of carbon. It Is Shown that when introduction of carbon significant change the relief exists in film SiO2 and porosity film SiO2 with growing of the concentrations of carbon. Observed chanize the relief and porosity film SiO2 are explairied chemical interaction of carbon, with forming the flying join in process of the evaporation.
Keywords :
Automation; Crystals; Dielectric measurements; Diodes; Fasteners; Frequency conversion; Gunn devices; Lattices; Microscopy; Solid state circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2004. APEIE 2004. 2004 7th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
0-7803-8476-8
Type :
conf
Filename :
1427227
Link To Document :
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