Title :
Use of modern approaches in automation of measurement of properties of a dielectric layer in MOS-structures
Author :
Troyian, P.E. ; Zaitchev, N.G.
Abstract :
The problem of a measurement of properties of dielectrics by a method of a capacity devider is considered. Is offered and the method of automation of process of a measurement a volt of performances MAH - structures on the basis of the COMPUTER´is realized.
Keywords :
Automation; Crystals; Dielectric measurements; Diodes; Fasteners; Frequency conversion; Gunn devices; Lattices; Microscopy; Ultrasonic variables measurement;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2004. APEIE 2004. 2004 7th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
0-7803-8476-8
