DocumentCode
434091
Title
Problems of nanosecond laser technologies of film microstructures deposition
Author
Chesnokov, D.V. ; Chesnokov, V.V. ; Reznikova, E.F.
fYear
2004
fDate
21-24 Sept. 2004
Firstpage
216
Lastpage
216
Abstract
The interaction of nanosecond laser irradiation with substance in a microtechnological process of forming topological structures on substrates´s surface, especially in laser induced chemical vapor deposition of any materials (nanosecond LCVD)
Keywords
Chemical lasers; Chemical sensors; Chemical technology; Chemical vapor deposition; Electrons; Inductors; Microstructure; Plasma measurements; Silicon; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2004. APEIE 2004. 2004 7th International Conference on Actual Problems of
Conference_Location
Novosibirsk, Russia
Print_ISBN
0-7803-8476-8
Type
conf
Filename
1427230
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