Experimental implementation of a model-based inverse filter to attenuate hysteresis in an atomic force microscope

This paper addresses the development and experimental validation of a model-based, open loop control design for mitigating the frequency-dependent effects of hysteresis in an atomic force microscope (AFM). The models are based on homogenized energy relations which characterize the hysteretic constitutive behavior of the piezoceramic AFM stage. Approximate model inverses are then employed as filters to linearize transducer dynamics for control design. When experimentally implemented in open loop control designs, inverse compensation in this manner produces an approximately tenfold increase in tracking accuracy as compared with the unfiltered case.