An ultra-small high-performance silicon microphone using single-crystalline silicon

Author

Tajima, Toshifumi ; Iguchi, Yoshinori ; Goto, Masahide ; Ono, Kazuho ; Ando, Akio ; Tanioka, Kenkichi ; Takeshi, Futoshi ; Matsunaga, Susumu ; Yasuno, Yoshiaki

Author_Institution

NHK Sci. & Tech. Res. Labs., Tokyo, Japan

fYear

2005

fDate

8-12 Jan. 2005

Firstpage

279

Lastpage

280

Abstract

We have developed a prototype of an ultra-small high-performance condenser-type silicon microphone with a unique semiconductor microfabrication technology using extremely high-tensile-strength single-crystalline silicon, having both mass producibility and outstanding reliability. The microphone we fabricated has such acoustic characteristics as a wide frequency range of 30 Hz to 20 kHz, sensitivity of over -42 dB, and wide dynamic range of 134 dB_SPL, sufficient for broadcasting and consumer use.

Keywords

microphones; silicon; tensile strength; 30 Hz to 20 kHz; condenser-type silicon microphone; high-performance silicon microphone; high-tensile-strength silicon; mass producibility; reliability; semiconductor microfabrication technology; single-crystalline silicon; ultra-small silicon microphone; Broadcasting; Capacitance; Dynamic range; Frequency; Laboratories; Manufacturing; Microphones; Prototypes; Semiconductor device manufacture; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Consumer Electronics, 2005. ICCE. 2005 Digest of Technical Papers. International Conference on

Print_ISBN

0-7803-8838-0

Type

conf

DOI

10.1109/ICCE.2005.1429826

Filename

1429826