Title :
A novel silicon-based CBCPW-fed CBCPS ring resonator
Author :
Ma, Kaixue ; Ma, Jianguo ; Do, Manh Anh ; Yeo, Kiat Seng ; Sun, Jianbo ; Miao, Jianmin
Author_Institution :
Center for Integrated Circuits & Syst., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
A silicon-based uni-planar CBCPW-fed CBCPS ring resonator is introduced for the first time. The simulated Q-factor of CBCPS ring is higher than that of the microstrip line (MSL) ring and a weak parasite resonant phenomenon is existed in spectrum response of the CBCPS ring resonator due to the crosstalk of the PP (parallel plate) modes. The micromachined fabrication process is employed to fabricate the designed planar resonator. The measured unloading Q-factors of the CBCPS ring resonator are 53.5 at 10.62GHz, 45 at the second resonant frequency 20.93GHz.
Keywords :
coplanar waveguides; elemental semiconductors; micromechanical devices; microstrip resonators; 10.62 GHz; 20.93 GHz; CBCPS ring resonator; CBCPW-fed ring resonator; Q-factor; Si; micromachined fabrication process; parasite resonant phenomenon; planar resonator; silicon-based ring resonator; spectrum response; Conductors; Coplanar waveguides; Dielectric losses; Dielectric substrates; Fabrication; Integrated circuit technology; Optical ring resonators; Planar transmission lines; Q factor; Silicon;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1434981
