A novel silicon-based CBCPW-fed CBCPS ring resonator

Author

Ma, Kaixue ; Ma, Jianguo ; Do, Manh Anh ; Yeo, Kiat Seng ; Sun, Jianbo ; Miao, Jianmin

Author_Institution

Center for Integrated Circuits & Syst., Nanyang Technol. Univ., Singapore, Singapore

Volume

1

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

179

Abstract

A silicon-based uni-planar CBCPW-fed CBCPS ring resonator is introduced for the first time. The simulated Q-factor of CBCPS ring is higher than that of the microstrip line (MSL) ring and a weak parasite resonant phenomenon is existed in spectrum response of the CBCPS ring resonator due to the crosstalk of the PP (parallel plate) modes. The micromachined fabrication process is employed to fabricate the designed planar resonator. The measured unloading Q-factors of the CBCPS ring resonator are 53.5 at 10.62GHz, 45 at the second resonant frequency 20.93GHz.

Keywords

coplanar waveguides; elemental semiconductors; micromechanical devices; microstrip resonators; 10.62 GHz; 20.93 GHz; CBCPS ring resonator; CBCPW-fed ring resonator; Q-factor; Si; micromachined fabrication process; parasite resonant phenomenon; planar resonator; silicon-based ring resonator; spectrum response; Conductors; Coplanar waveguides; Dielectric losses; Dielectric substrates; Fabrication; Integrated circuit technology; Optical ring resonators; Planar transmission lines; Q factor; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1434981

Filename

1434981