Title :
Measurement technique of in-plane motion for MEMS based on block matching
Author :
Jin, Cuiyun ; Li, Dachao ; Jin, Shijiu ; Feng, Yalin ; Hao, Yilong ; Zhang, Dacheng
Author_Institution :
Precision Meas. Technol. & Instrum., Tianjin Univ., China
Abstract :
In order to measure motion characteristics and dynamic parameters of a MEMS resonator at every moment, by using stroboscopic imaging techniques, clear motion images for every moment in one cycle are obtained. Using the technique of block matching to process motion images of a MEMS resonator, the dynamic parameters are obtained. The results give important reference to MEMS design. Experimental results indicate that the repeatability of measurement is 40 nm.
Keywords :
image matching; image motion analysis; micromechanical resonators; motion measurement; MEMS design; MEMS in-plane motion measurement technique; MEMS resonator dynamic parameters measurement; block matching; motion images; stroboscopic imaging techniques; Charge coupled devices; Frequency measurement; Measurement techniques; Microelectromechanical devices; Microelectronics; Micromechanical devices; Motion analysis; Motion estimation; Motion measurement; Testing;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435209
