DocumentCode :
435844
Title :
A practical package technique for FBG-based temperature independent sensor
Author :
Tian, Keke ; Liu, Yuliang ; Wang, Qiming
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
Volume :
3
fYear :
2004
fDate :
18-21 Oct. 2004
Firstpage :
1908
Abstract :
A practical packaging technique for a temperature independent Fiber Bragg grating sensor is proposed. A uniform strength cantilever with two FBG attached on the upper and lower surfaces is utilized as the key element. By detecting the differential output of two wavelengths, the applied force can be obtained and temperature effects can be eliminated. Experimental results show that the sensor has a linear response and the output signal fluctuates less than 12 pm as the temperature changes from -10°C to 50°C. The maximum thermal error is less than 0.3% of the full measurement range.
Keywords :
Bragg gratings; fibre optic sensors; packaging; strain sensors; -10 to 50 C; applied force; differential output; linear response; packaging technique; strain transducer; temperature effects; temperature independent FBG sensor; temperature independent Fiber Bragg grating sensor; thermal error; uniform strength cantilever; wavelength shift; Bragg gratings; Capacitive sensors; Fiber gratings; Semiconductor device packaging; Silicon compounds; Strain measurement; Structural beams; Temperature sensors; Tensile strain; Thermal resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
Type :
conf
DOI :
10.1109/ICSICT.2004.1435210
Filename :
1435210
Link To Document :
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