Hierarchical Petri net model and its application for scheduling of semiconductor production line

In this paper 3 kind of colored Petri net based hierarchical scheduling model is proposed by introducing multi-dimension color sets and machine group oriented hierarchy. Then, the modeling approach, which consists of top-down structure modeling and bottom-up parameter definition, is discussed. At last, a case study of the proposed model as well as its modeling approach are illustrated within example semiconductor production fine.