Title :
Identification of radiation-induced parasitic leakage paths using light emission microscopy
Author :
Shaneyfelt, Marty R. ; Tangyunyong, Paiboon ; Hill, Thomas A. ; Soden, Jeny M. ; Flores, Richard S. ; Schwank, James R. ; Dodd, Paul E. ; Hash, Gerald L.
Keywords :
CMOS technology; Degradation; Integrated circuit technology; Integrated circuit testing; Leakage current; Manufacturing processes; Microscopy; Process design; Radiation hardening; Transistors;
Conference_Titel :
Radiation and Its Effects on Components and Systems, 2003. RADECS 2003. Proceedings of the 7th European Conference on
Conference_Location :
Noordwijk, The Netherlands
Print_ISBN :
92-9092-846-8