DocumentCode

437205

Title

Breaker page

fYear

2005

fDate

38467

Firstpage

42588

Lastpage

42588

fLanguage

English

Publisher

iet

Conference_Titel

MEMS Sensor Technologies, 2005. The IEE Seminar and Exhibition on

Conference_Location

IET

ISSN

0537-9989

Print_ISBN

0-86341-523-7

Type

conf

Filename

1453368