Single-resonator fourth-order micromechanical disk filters

Author

Demirci, Mustafa U. ; Nguyen, Clark T C

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

207

Lastpage

210

Abstract

A method for realizing a fourth-order micromechanical filter response using only a single, mass-loaded, flexural-mode disk resonator has been used to demonstrate a 20.26-MHz fourth-order Butterworth filter with a tiny 0.03% bandwidth and only 2.56 dB of insertion loss. The basic design technique uses orthogonal mode-splitting and recombining to achieve a parallel-class filter that dispenses with the need for multiple resonators and coupling links in previous filters. The single-resonator disk structure has a measured temperature coefficient of frequency TC_f of -14.2ppm/°C and a third order intercept point IIP₃ of +20.6dBm, which indicates very good device linearity.

Keywords

Butterworth filters; micromechanical devices; 2.56 dB; 20.26 MHz; Butterworth filter; coupling links; design technique; flexural-mode disk resonator; fourth-order micromechanical disk filters; mass-loaded disk resonator; multiple resonators; orthogonal mode-splitting; parallel-class filter; single-resonator micromechanical disk filter; temperature coefficient; third order intercept point; Bandwidth; Circuits; Filter bank; Frequency; Insertion loss; Micromechanical devices; Passband; Resonance; Resonator filters; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453903

Filename

1453903