Adhesion and contact resistance in an electrostatic MEMS microswitch

Author

Majumder, S. ; McGrue, N.E. ; Adams, G.

Author_Institution

Radant MEMS, Stowe, MA, USA

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

215

Lastpage

218

Abstract

A multi-asperity model of the contact resistance in a MEMS microswitch has been developed which includes the effects of elastic and plastic deformation, adhesion, and constrictive resistance. The number of asperities in contact is small enough that a discrete distribution of asperity heights is used. Adhesion produces significant hysteresis in the contact resistance vs. contact force characteristics. Due to the combined effects of plasticity and adhesion, the surface profile changes during the first load/unload cycle. Measurements of the contact resistance as a function of actuation voltage show good qualitative agreement with the model.

Keywords

adhesion; contact resistance; elastic deformation; electrostatic devices; microswitches; plastic deformation; actuation voltage; adhesion resistance; asperity heights; constrictive resistance; contact force characteristics; contact resistance; discrete distribution; elastic deformation; electrostatic MEMS microswitch; multi-asperity model; plastic deformation; surface profile; Adhesives; Contact resistance; Deformable models; Electrical resistance measurement; Electrostatics; Hysteresis; Micromechanical devices; Microswitches; Plastics; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453905

Filename

1453905