DocumentCode

437227

Title

Selective stiction based vertical comb actuators

Author

Kim, Jongbaeg ; Christensen, Dane ; Lin, Liwei

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

403

Lastpage

406

Keywords

Actuators; Etching; Fabrication; Hafnium; Inspection; Microstructure; Mirrors; Process design; Springs; Stators;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453952

Filename

1453952