Stiction-free cantilevers with rounded cross-section

Author

Kim, Dae-Hvun ; Jeon, Jin-Wan ; Chang, Sung-Il ; Lim, Koeng Su ; Yoon, Jun-Bo

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., South Korea

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

455

Lastpage

458

Abstract

In this work, we developed a novel anti-stiction structure with rounded cross section which dramatically prevented stiction by reducing the Laplace pressure force and contact areas effectively. Also structure with rounded cross-section was more effective in reducing stiction because of the increased rigidity. We demonstrated a 6μm-suspended 1μm-thick metal cantilever with 60μm in width and 1,000μm in length successfully released in the conventional wet releasing process for the beam with rounded cross-section, while the length was limited to 125μm for the beam with rectangular cross-section.

Keywords

micromachining; micromechanical devices; stiction; surface tension; 1 micron; 1000 micron; 125 micron; 6 micron; 60 micron; Laplace pressure force; contact areas; conventional wet releasing process; metal cantilever; rigidity; rounded cross section; stiction free cantilevers; stiction reduction; Adhesives; Contacts; Costs; Geometry; Laplace equations; Micromachining; Structural beams; Substrates; Surface tension; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453965

Filename

1453965