Title :
Programmable reconfigurable self-assembly: approaching the parallel heterogeneous integration on flexible substrates
Author :
Chung, Jue-Hoon ; Zheng, Wei ; Jacobs, Heiko O.
Author_Institution :
Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
This paper reports on a programmable reconfigurable liquid solder directed self assembly (PRS) method to enable parallel heterogeneous integration of components on nonplanar substrates. Metal contacts on segmented semiconductor devices bind to liquid-solder-based-receptors on a substrate surface during the fluidic self assembly. Programmability is implemented using solder-based receptors that can be switched "On" and "Off" using integrated heaters. This programmability enables the heterogeneous batch integration of components by sequentially activating selected receptors. We fabricated a prototype substrate to experimentally test the feasibility of PRS and successfully demonstrate the programmable assembly of multiple types of components onto target positions.
Keywords :
microfluidics; self-assembly; solders; flexible substrates; fluidic self assembly; integrated heaters; liquid solder based receptors; liquid solder directed self assembly; metal contacts; nonplanar substrates; parallel heterogeneous integration; programmable reconfigurable assembly; semiconductor devices; Assembly systems; Contacts; Fabrication; Jacobian matrices; Prototypes; Robotic assembly; Self-assembly; Semiconductor devices; Substrates; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453994