Title :
Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field
Author :
Iwase, Eiji ; Shimoyama, Isao
Author_Institution :
Dept. of Mechano-Informatics, Tokyo Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
We have developed a process for multistep sequential batch self assembly of complex three dimensional ferromagnetic microstructures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. In our previous study, we found that a nondimensional factor that depends on its shape determines the sensitivity of the micro hinged structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multistep sequential assembly by using the nondimensional factor. Four step sequential batch assembly was demonstrated using this method.
Keywords :
ferromagnetic materials; magnetic fields; magnetomechanical effects; nanostructured materials; nanotechnology; self-assembly; sensitivity; torque; 3D ferromagnetic microstructures; hinged structures lifting; magnetic field; magnetic torque; micro hinged structures; multistep sequential batch self assembly; nondimensional factor; Assembly; Fasteners; Magnetic fields; Magnetic materials; Micromagnetics; Nickel; Resists; Self-assembly; Shape; Thermal force;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453998