A novel micro counter-stream-mode oscillating-flow (COSMOS) heat-pipe

Author

Sugimoto, Masahiro ; Minai, Kuzuyuki ; Uemura, Mitsuhiro ; Nishio, Shigeji ; Tabata, Osamu

Author_Institution

Ritsumeikan Univ., Shiga, Japan

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

606

Lastpage

609

Abstract

This paper presents, for the first time, a novel thin heat spreader based on COunter Stream Mode OScillating flow (COSMOS) concept. The heat spreader fabricated by silicon micromachining has 14 folded meander Si groove with total length of 700 mm, width of 575 μm, depth of 400 μm and the wall thickness between the adjacent channels of 150 μm which is connected to two piezoelectric type pumps. The total device size was 86 × 57 mm² and the effective cross-section of the heat-pipe was 0.5 × 10 mm². The device demonstrated the temperature gradient of 500 K/m and the heat transport rate of 20 W with using water as working fluid. From these results, the effective thermal conductivity was calculated to 9×10³ W/m·K which is 23 times larger than that of copper.

Keywords

heat pipes; heat transfer; micromachining; thermal conductivity; 20 W; COSMOS heat-pipe; Si groove; heat transport rate; micro counter-stream-mode oscillating-flow; piezoelectric type pumps; silicon micromachining; temperature gradient; thermal conductivity; thin heat spreader; Electronics cooling; Heat pumps; Heat sinks; Heat transfer; Micromechanical devices; Portable computers; Space technology; Temperature control; Thermal conductivity; Thermal variables control;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1454002

Filename

1454002