Title :
Issues in nanoimprint processes: the imprint pressure
Author :
Scheer, H.-C. ; Wissen, M. ; Bogdanski, N.
Keywords :
Costs; Glass; Lithography; Polymers; Resins; Resists; Rheology; Temperature; Thermal force; Viscosity;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245717
