DocumentCode

437319

Title

Issues in nanoimprint processes: the imprint pressure

Author

Scheer, H.-C. ; Wissen, M. ; Bogdanski, N.

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

52

Lastpage

53

Keywords

Costs; Glass; Lithography; Polymers; Resins; Resists; Rheology; Temperature; Thermal force; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

conf

DOI

10.1109/IMNC.2004.245717

Filename

1459467