DocumentCode
437321
Title
Development of the optical component for EUV phase-shift microscopes
Author
Hosokawa, N. ; Tsutomu, N. ; Hamamoto, Kiichi ; Kinoshita, Hiroyuki
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
92
Lastpage
93
Keywords
Laboratories; Lithography; Mirrors; Nonhomogeneous media; Optical devices; Optical microscopy; Reflectivity; Research and development; Transistors; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245739
Filename
1459489
Link To Document