Title :
Proposal of large exposure area and wide dimensional X-ray lithography for liga process using energy variable synchrotron radiation
Author :
Utsumi, Yuichi ; Kishimoto, Takefumi ; Hattori, Tadashi ; Hara, Hirotsugu
Keywords :
Fabrication; Microstructure; Proposals; Resists; Shape; Storage rings; Strontium; Substrates; Synchrotron radiation; X-ray lithography;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245745
