• DocumentCode
    437324
  • Title

    Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling

  • Author

    Mitsuishi, K. ; Shimojo, Makoto ; Tanaka, M. ; Takeguchi, M. ; Furuya, K.

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    118
  • Lastpage
    119
  • Keywords
    Electron beams; Energy resolution; Fabrication; Gold; Materials science and technology; Milling; Nanofabrication; Nanostructured materials; Nanostructures; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245752
  • Filename
    1459502
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=437324