DocumentCode
437326
Title
UV nanoimprint lithography using a large area stamp in a low vacuum environment
Author
Lee, Eung-Sug ; Jeong, Jun-Ho ; Young-suk Sm ; Sohn, Hyonkee ; Shin, Young-Jae ; Choi, Dae-Geun
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
140
Lastpage
141
Keywords
Machine intelligence; Machinery; Nanofabrication; Nanolithography; Pressing; Resins; Temperature; Textile industry; Ultraviolet sources; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245763
Filename
1459513
Link To Document