DocumentCode
437336
Title
Fabrication and evaluation of thermal nano-sensor by focused-ion-beam chemical-vapor-deposition
Author
Ozasa, Akinori ; Kometani, Reo ; Morital, T. ; Kondo, Kazushige ; Kanda, Kazuhiro ; Haruyama, Y. ; Fujita, Jun-ichi ; Kaito, Takashi ; Matsui, Shinji
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
266
Lastpage
267
Keywords
Chemical technology; Conductivity; Electrical resistance measurement; Electrodes; Fabrication; Gold; Nanostructures; Temperature dependence; Thermal engineering; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245644
Filename
1459578
Link To Document