DocumentCode :
437336
Title :
Fabrication and evaluation of thermal nano-sensor by focused-ion-beam chemical-vapor-deposition
Author :
Ozasa, Akinori ; Kometani, Reo ; Morital, T. ; Kondo, Kazushige ; Kanda, Kazuhiro ; Haruyama, Y. ; Fujita, Jun-ichi ; Kaito, Takashi ; Matsui, Shinji
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
266
Lastpage :
267
Keywords :
Chemical technology; Conductivity; Electrical resistance measurement; Electrodes; Fabrication; Gold; Nanostructures; Temperature dependence; Thermal engineering; Thermal resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245644
Filename :
1459578
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=437336
