DocumentCode
437337
Title
Advances of EUV interferometry in EUVA
Author
Ouchi, Chidane ; Hasegawa, Masanobu ; Kato, Seima ; Suzuki, Akiyoshi ; Sugisaki, Katsumi ; Okada, Masashi ; Saito, Jun ; Murakami, Katsuhiko ; Niibe, Masahito ; Takeda, Mitsuo
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
286
Lastpage
287
Keywords
Assembly systems; Diffraction; Gratings; Laboratories; Large scale integration; Lithography; Metrology; Optical interferometry; Shearing; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245655
Filename
1459589
Link To Document