• DocumentCode
    437483
  • Title

    Sputter process variables prediction via data mining

  • Author

    Ravi, V. ; Shalom, S. A Arul ; Manickavel, A.

  • Author_Institution
    Inst. of Syst. Sci., Nat. Univ. of Singapore, Singapore
  • Volume
    1
  • fYear
    2004
  • fDate
    1-3 Dec. 2004
  • Firstpage
    256
  • Abstract
    Media manufacturing process plays a vital role in the hard disk drive (HDD) industry. Sputtering is an important process within the media manufacturing process that provides magnetic properties, which in turn affects the performance of the media in a HDD assembly. In this study, an attempt has been made to predict the critical magnetic characteristics and yield of the media, which in turn affects the overall product performance, by resorting to data mining technology. Feature selection was carried out using methods such as principal components analysis (PCA), and weight information of multilayer feed-forward neural networks (MLFF) and general regression neural networks (GRNN). In addition, classification and regression trees (CART) was used to generate rules to understand the dataset, as neural networks are considered as black boxes without rule extraction mechanism. A new hybrid architecture was also developed combining the top inputs identified by MLFF, GRNN and CART. It is concluded that models constructed using feature selection carried out by MLFF or GRNN performed very well. These models are preferred since they use the minimum number of input variables. Hence they are practically and economically more viable than other models with similar performance. The predictions have been validated using the 10-fold cross validation method, to ensure that the results are not due to any anomaly in the dataset.
  • Keywords
    data mining; electron device manufacture; electronics industry; feedforward neural nets; hard discs; multilayer perceptrons; principal component analysis; sputtering; HDD; PCA; data mining; feature selection; general regression neural networks; hard disk drive; media manufacturing process; multilayer feed-forward neural networks; principal components analysis; regression trees; sputter process variables prediction; Data mining; Feedforward neural networks; Hard disks; Magnetic properties; Manufacturing industries; Manufacturing processes; Multi-layer neural network; Neural networks; Principal component analysis; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Cybernetics and Intelligent Systems, 2004 IEEE Conference on
  • Print_ISBN
    0-7803-8643-4
  • Type

    conf

  • DOI
    10.1109/ICCIS.2004.1460422
  • Filename
    1460422