High-frequency resistivity of soft magnetic granular films

Author

Li, Weidong ; Sun, Yuqin ; Sullivan, Charles R.

Author_Institution

Thayer Sch. of Eng., Dartmouth Coll., Hanover, NH, USA

fYear

2005

fDate

4-8 April 2005

Firstpage

529

Lastpage

530

Abstract

Soft Co-Zr-O granular films with 1 to 10 μm thickness were prepared by reactive sputtering. The films were deposited by DC magnetron sputtering on water-cooled glass slides and Si substrates in an Ar + O₂ atmosphere using a CoZr alloy target (Co:Zr = 85:15 atomic ratio). A Halbach magnet array was used to induce in-plane anisotropy in the films. Magnetic properties and DC electrical resistivity were measured with a vibrating sample magnetometer and the conventional four-point probe method, respectively. Measured values of the uniaxial magnetic anisotropy and high-frequency permeability show that the granular films have good linear properties.

Keywords

cobalt compounds; electrical resistivity; granular materials; induced anisotropy (magnetic); magnetic permeability; magnetic thin films; soft magnetic materials; sputtered coatings; zirconium compounds; 1 to 10 mum; CoZrO; DC electrical resistivity; DC magnetron sputtering; Halbach magnet array; Si; SiO₂; conventional four-point probe method; high-frequency permeability; high-frequency resistivity; linear properties; magnetic properties; soft magnetic granular films; uniaxial magnetic anisotropy; vibrating sample magnetometer; water-cooled glass slides; Atmospheric measurements; Conductivity; Glass; Magnetic anisotropy; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Semiconductor films; Soft magnetic materials; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1463693

Filename

1463693