High-frequency resistivity of soft magnetic granular films

Soft Co-Zr-O granular films with 1 to 10 μm thickness were prepared by reactive sputtering. The films were deposited by DC magnetron sputtering on water-cooled glass slides and Si substrates in an Ar + O₂ atmosphere using a CoZr alloy target (Co:Zr = 85:15 atomic ratio). A Halbach magnet array was used to induce in-plane anisotropy in the films. Magnetic properties and DC electrical resistivity were measured with a vibrating sample magnetometer and the conventional four-point probe method, respectively. Measured values of the uniaxial magnetic anisotropy and high-frequency permeability show that the granular films have good linear properties.