Title :
High magnetization ferromagnetic spiral inductors using shape anisotropy
Author :
Couderc, S. ; Viala, B. ; Royet, A.S. ; Ancey, P. ; Bouche, G.
Author_Institution :
STMicroelectronics, France
Abstract :
The main issue for 100% amplification with spirals using single deposition step process has been successfully achieved in this paper, with the use of high magnetization feHfN film as a core material. This allows combining shape anisotropy, solid magnetic plane design, high permeability and high FMR, being thought the most efficient and low cost solution for inductance enhancement and scaling down inductor dimensions.
Keywords :
ferromagnetic materials; ferromagnetic resonance; inductors; magnetic anisotropy; magnetic thin films; core material; ferromagnetic resonance; high magnetization ferromagnetic spiral inductors; high permeability; inductance enhancement; shape anisotropy; single deposition step process; solid magnetic plane design; Anisotropic magnetoresistance; Inductors; Magnetic anisotropy; Magnetic cores; Magnetic films; Magnetic materials; Magnetization; Shape; Solids; Spirals;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463705
