DocumentCode :
438232
Title :
TEM study of grain boundary structure in CoCrPt-SiO2/Ru for perpendicular magnetic recording media
Author :
Araki, R. ; Takahashi, Y.
Author_Institution :
Storage Technol. Center, Hitachi Ltd., Japan
fYear :
2005
fDate :
4-8 April 2005
Firstpage :
585
Lastpage :
586
Abstract :
In this paper, we analyzed the dispersion of grain boundary width in CoCrPt-SiO2 magnetic layer with various grain sizes deposited on a Ru underlayer. Also, we discuss the relation between the grain sizes of the magnetic layer and the underlayer. The CoCrPt-SiO2 magnetic layer was fabricated with rotating CoCrPt and SiO2 cathodes using a magnetron sputtering system with a thickness of 16 nm. The grain size of the magnetic layer was varied by adding oxygen to the sputtering argon gas. The grain boundary structure was analyzed with a Hitachi HF-2000 transmission electron microscope.
Keywords :
chromium alloys; cobalt alloys; grain boundaries; grain size; perpendicular magnetic recording; platinum alloys; ruthenium; sputter deposition; transmission electron microscopy; 16 nm; CoCrPt; Ru-SiO2; TEM; argon gas; grain boundary structure; grain size; magnetic layer; magnetron sputtering; perpendicular magnetic recording media; Argon; Cathodes; Fabrication; Grain boundaries; Grain size; Lattices; Magnetic films; Microstructure; Perpendicular magnetic recording; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
Type :
conf
DOI :
10.1109/INTMAG.2005.1463721
Filename :
1463721
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=438232
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