• DocumentCode
    438232
  • Title

    TEM study of grain boundary structure in CoCrPt-SiO2/Ru for perpendicular magnetic recording media

  • Author

    Araki, R. ; Takahashi, Y.

  • Author_Institution
    Storage Technol. Center, Hitachi Ltd., Japan
  • fYear
    2005
  • fDate
    4-8 April 2005
  • Firstpage
    585
  • Lastpage
    586
  • Abstract
    In this paper, we analyzed the dispersion of grain boundary width in CoCrPt-SiO2 magnetic layer with various grain sizes deposited on a Ru underlayer. Also, we discuss the relation between the grain sizes of the magnetic layer and the underlayer. The CoCrPt-SiO2 magnetic layer was fabricated with rotating CoCrPt and SiO2 cathodes using a magnetron sputtering system with a thickness of 16 nm. The grain size of the magnetic layer was varied by adding oxygen to the sputtering argon gas. The grain boundary structure was analyzed with a Hitachi HF-2000 transmission electron microscope.
  • Keywords
    chromium alloys; cobalt alloys; grain boundaries; grain size; perpendicular magnetic recording; platinum alloys; ruthenium; sputter deposition; transmission electron microscopy; 16 nm; CoCrPt; Ru-SiO2; TEM; argon gas; grain boundary structure; grain size; magnetic layer; magnetron sputtering; perpendicular magnetic recording media; Argon; Cathodes; Fabrication; Grain boundaries; Grain size; Lattices; Magnetic films; Microstructure; Perpendicular magnetic recording; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
  • Print_ISBN
    0-7803-9009-1
  • Type

    conf

  • DOI
    10.1109/INTMAG.2005.1463721
  • Filename
    1463721