Title :
Magnetostrictive properties of Tb-Fe-Co system thin films
Author :
Kiyomiya, T. ; Yamada, Y. ; Matsuo, Y. ; Wakiwaka, H. ; Torii, Y. ; Makimura, M.
Author_Institution :
FDK Corp., Shizuoka, Japan
Abstract :
The magnetostrictive properties of Tb-Fe-Co system thin films are studied. The largest magnetostriction is obtained when Ar gas pressure during sputter deposition is set to 0.7 Pa. Also, the magnetostrictive properties are improved drastically with annealing process between 200°C and 300°C. Furthermore, it is observed that the Curie temperature of the Tb-Fe-Co film is very low but can be improved with Co ratio. The evaluation of the films is carried out using an X-ray diffractometer, electron probe micro-analysis and vibrating sample magnetometer for the structural properties, composition analysis and magnetization properties, respectively. The magnetostriction and internal stress of the film is measured using a cantilever actuator and a long-scan profile, respectively.
Keywords :
Curie temperature; X-ray diffraction; annealing; cobalt alloys; electron probe analysis; internal stresses; iron alloys; magnetic thin films; magnetisation; magnetostriction; sputtered coatings; terbium alloys; 0.7 Pa; 200 to 300 degC; Curie temperature; TbFeCo; X-ray diffractometer; annealing; cantilever actuator; composition analysis; electron probe microanalysis; gas pressure; giant magnetostrictive thin films; internal stress; long-scan profile; magnetization; magnetostriction; sputter deposition; structural properties; vibrating sample magnetometer; Annealing; Argon; Electrons; Magnetic properties; Magnetostriction; Probes; Sputtering; Temperature; Transistors; X-ray diffraction;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1464408
