DocumentCode
438886
Title
The research on dispatching rule for improving on-time delivery for semiconductor wafer fab
Author
Li, Li ; Qiao, Fei ; Jiang, Hua ; Wu, Qidi
Author_Institution
Sch. of Electron. & Inf. Eng., Tongji Univ., Shanghai, China
Volume
1
fYear
2004
fDate
6-9 Dec. 2004
Firstpage
494
Abstract
Semiconductor wafer fab cries for really dynamic dispatching approach, due to its high uncertainty, re-entrance and large-scale. A dispatching rule for improving on-time delivery for semiconductor wafer fab (ODDR) is proposed, which considers the dispatching of bottleneck machines, not-bottleneck machines, batching machines and hot lots. As a result, it can distinctly improve on-time delivery without decreasing the throughput and increasing the cycle time. Finally, a simplistic model, but with essential characteristics of semiconductor wafer fab, is used to compare ODDR with FIFO, EDD and CR. It can be seen from the experimental results that ODDR is prior to FIFO, EDD and CR on throughput, cycle time and on-time delivery with better performance, especially for on-time delivery.
Keywords
dispatching; dynamic scheduling; manufacturing processes; semiconductor device manufacture; cycle time; dispatching rule; dynamic dispatching; on-time delivery; semiconductor wafer fab; Chromium; Cities and towns; Computer integrated manufacturing; Dispatching; Manufacturing processes; Semiconductor device modeling; Throughput; Time factors; Uncertainty; Workstations;
fLanguage
English
Publisher
ieee
Conference_Titel
Control, Automation, Robotics and Vision Conference, 2004. ICARCV 2004 8th
Print_ISBN
0-7803-8653-1
Type
conf
DOI
10.1109/ICARCV.2004.1468875
Filename
1468875
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