DocumentCode :
43922
Title :
Top Down Scale-Up of Semiconducting Nanostructures for Large Area Electronics
Author :
Cheng Sun ; Ahnood, Arman ; Sungsik Lee ; Mathews, Nripan ; Mhaisalkar, Subodh ; Nathan, Arokia
Author_Institution :
Sch. of Mater. Sci. & Eng., Nanyang Technol. Univ., Singapore, Singapore
Volume :
10
Issue :
8
fYear :
2014
fDate :
Aug. 2014
Firstpage :
660
Lastpage :
665
Abstract :
In this paper, we present a study on electrical and optical characteristics of n-type tin-oxide nanowires integrated based on top-down scale-up strategy. Through a combination of contact printing and plasma based back-channel passivation, we have achieved stable electrical characteristics with standard deviation in mobility and threshold voltage of 9.1% and 25%, respectively, for a large area of 1 ×1 cm2 area. Through use of contact printing, high alignment of nanowires was achieved thus minimizing the number of nanowire-nanowire junctions, which serve to limit carrier transport in the channel. In addition, persistent photoconductivity has been observed, which we attribute to oxygen vacancy ionization and subsequent elimination using a gate pulse driving scheme.
Keywords :
carrier mobility; field effect transistors; nanofabrication; nanowires; passivation; photoconductivity; plasma CVD; semiconductor growth; semiconductor materials; thin film transistors; tin compounds; vacancies (crystal); SnO2; carrier transport; contact printing; electrical characteristics; gate pulse driving scheme; large area electronics; n-type tin-oxide nanowires; nanowire-nanowire junctions; optical characteristics; oxygen vacancy ionization; photoconductivity; plasma based back-channel passivation; semiconducting nanostructures; stable electrical characteristics; standard deviation; thin-film transistor; threshold voltage; top-down scale-up strategy; Logic gates; Nanowires; Passivation; Temperature measurement; Thin film transistors; Threshold voltage; Large area electronics; nanowires; plasma- enhanced chemical vapor deposition; top-down integration; uniformity;
fLanguage :
English
Journal_Title :
Display Technology, Journal of
Publisher :
ieee
ISSN :
1551-319X
Type :
jour
DOI :
10.1109/JDT.2014.2312792
Filename :
6776429
Link To Document :
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