Title :
A position detection sensor for 3-D measurement
Author :
Nezuka, Tomohiro ; Hoshino, Masashi ; Ikeda, Makoto ; Asada, Kunihiro
Author_Institution :
University of Tokyo, Japan
Abstract :
In this paper, a position detection sensor for 3-D measurement is presented. The sensor is designed for detecting positions of laser spots projected on target objects quickly. The sensor has a 256×256 pixel array, a set of address decoders for variable block access and a variable block logical-OR circuit on an 8.9mm × 8.9mm die. The sensor is designed and fabricated in 0.6 µm 3-Metal 2-Poly-Si CMOS process. By the result of measurements using fabricated chips, the accuracy of the 3-D measurement is 0.4%. The speed of 3-D measurement is up to 10000points/sec.
Keywords :
CMOS process; Circuits; Decoding; Logic arrays; Object detection; Optical design; Position measurement; Semiconductor device measurement; Sensor arrays; Velocity measurement;
Conference_Titel :
Solid-State Circuits Conference, 2000. ESSCIRC '00. Proceedings of the 26rd European
Conference_Location :
Stockholm, Sweden
