A smart position sensor with row parallel position detection for high speed 3-D measurement

In this paper, we propose a new image scanning method using row parallel binary-trees as data paths to image data. Using the scan method, we can detect position of projected sheet light in parallel in each row. We propose an efficient implementation method of row parallel binary-tree scan and developed a smart position sensor for 3-D measurement using a 0.35µm CMOS 3-metal 2- poly-Si process. The sensor has a 128×128 pixel array, an address decoder, a scan controller on a 4.9mm × 4.9mm die. We have developed a 3-D measurement system using a fabricated sensor, and measured the 3-D feature of moving objects at 12 rangemaps/s. By the results of circuit simulation, the maximum speed of 3-D measurement using row parallel binary-tree scan is 600 rangemaps/s.