DocumentCode :
440045
Title :
Coplanar Al-Al
2
O
3
-Al gate CCD
Author :
Ohzone, T. ; Horiuchi, S. ; Kadota, H. ; Kagawa, Keiichiro
Volume :
22
fYear :
1976
fDate :
1976
Firstpage :
35
Lastpage :
37
Keywords :
Capacitance; Charge coupled devices; Clocks; Electrodes; Etching; Fabrication; Laboratories; Oxidation; Pulse amplifiers; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1976 International
Conference_Location :
IEEE
Type :
conf
Filename :
1478690
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=440045
