DocumentCode

440045

Title

Coplanar Al-Al2O3-Al gate CCD

Author

Ohzone, T. ; Horiuchi, S. ; Kadota, H. ; Kagawa, Keiichiro

Volume

22

fYear

1976

fDate

1976

Firstpage

35

Lastpage

37

Keywords

Capacitance; Charge coupled devices; Clocks; Electrodes; Etching; Fabrication; Laboratories; Oxidation; Pulse amplifiers; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1976 International

Conference_Location

IEEE

Type

conf

Filename

1478690