Title :
Experimental investigations of the intrinsic performance limitations of short channel nonplanar MOS transistors
Author :
Heng, T.M.S. ; Oakes, J.G. ; Wickstrom, R.A.
Keywords :
Cutoff frequency; Displays; Electrooptic devices; Geometry; Laboratories; Limiting; MOSFETs; Process design; Space charge; Voltage;
Conference_Titel :
Electron Devices Meeting, 1976 International
Conference_Location :
IEEE
