• DocumentCode
    440076
  • Title

    The NCPV process integration project: purpose, status, and direction

  • Author

    Nelson, Brent ; Robbins, Steven ; Sheldon, Peter

  • Author_Institution
    Nat. Center for Photovoltaics, Nat. Renewable Energy Lab., Golden, CO, USA
  • fYear
    2005
  • fDate
    3-7 Jan. 2005
  • Firstpage
    243
  • Lastpage
    246
  • Abstract
    The primary purpose of the process integration project of the National Center for Photovoltaics (NCPV) is to develop an infrastructure that will allow researchers to gain new knowledge that is difficult-if not impossible-to obtain with existing equipment. This difficulty is due, in part, to the state of our existing tool set, which lacks sufficient in-situ or real-time measurement capabilities, or lacks access to analytical tools where the sample remains in a controlled environment between deposition and processing or measurement. This new infrastructure will provide flexible and robust integration of deposition, processing (etching, annealing, etc.), and characterization tools via a standardized transfer interface such that samples move between tools in a controlled ambient. The standardization of control and data acquisition software schemes, sample handing, and equipment components will allow us to perform research more efficiently; facilitating collaborations and technique development.
  • Keywords
    data acquisition; photovoltaic effects; semiconductor device manufacture; National Center for Photovoltaics; annealing; control standardization; data acquisition software scheme; deposition; etching; infrastructure development; process integration project; standardized transfer interface; Automatic control; Collaborative software; Control systems; Laboratories; Manufacturing industries; Photovoltaic cells; Pollution measurement; Renewable energy resources; Spectroscopy; Surface reconstruction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 2005. Conference Record of the Thirty-first IEEE
  • ISSN
    0160-8371
  • Print_ISBN
    0-7803-8707-4
  • Type

    conf

  • DOI
    10.1109/PVSC.2005.1488114
  • Filename
    1488114