DocumentCode
440076
Title
The NCPV process integration project: purpose, status, and direction
Author
Nelson, Brent ; Robbins, Steven ; Sheldon, Peter
Author_Institution
Nat. Center for Photovoltaics, Nat. Renewable Energy Lab., Golden, CO, USA
fYear
2005
fDate
3-7 Jan. 2005
Firstpage
243
Lastpage
246
Abstract
The primary purpose of the process integration project of the National Center for Photovoltaics (NCPV) is to develop an infrastructure that will allow researchers to gain new knowledge that is difficult-if not impossible-to obtain with existing equipment. This difficulty is due, in part, to the state of our existing tool set, which lacks sufficient in-situ or real-time measurement capabilities, or lacks access to analytical tools where the sample remains in a controlled environment between deposition and processing or measurement. This new infrastructure will provide flexible and robust integration of deposition, processing (etching, annealing, etc.), and characterization tools via a standardized transfer interface such that samples move between tools in a controlled ambient. The standardization of control and data acquisition software schemes, sample handing, and equipment components will allow us to perform research more efficiently; facilitating collaborations and technique development.
Keywords
data acquisition; photovoltaic effects; semiconductor device manufacture; National Center for Photovoltaics; annealing; control standardization; data acquisition software scheme; deposition; etching; infrastructure development; process integration project; standardized transfer interface; Automatic control; Collaborative software; Control systems; Laboratories; Manufacturing industries; Photovoltaic cells; Pollution measurement; Renewable energy resources; Spectroscopy; Surface reconstruction;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 2005. Conference Record of the Thirty-first IEEE
ISSN
0160-8371
Print_ISBN
0-7803-8707-4
Type
conf
DOI
10.1109/PVSC.2005.1488114
Filename
1488114
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