DocumentCode
440216
Title
Dopants, Defects, Clusters: A Process Modelling Taxonomy
Author
Law, M.E. ; Saleh, H. ; Jones, K.S.
Author_Institution
University of Florida, Gainesville, FL, USA
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
135
Lastpage
143
Keywords
Chemical processes; Implants; Rapid thermal annealing; Semiconductor process modeling; Silicon; Size measurement; Taxonomy; Temperature; Testing; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505459
Link To Document