DocumentCode :
440216
Title :
Dopants, Defects, Clusters: A Process Modelling Taxonomy
Author :
Law, M.E. ; Saleh, H. ; Jones, K.S.
Author_Institution :
University of Florida, Gainesville, FL, USA
Volume :
1
fYear :
1999
fDate :
13-15 Sept. 1999
Firstpage :
135
Lastpage :
143
Keywords :
Chemical processes; Implants; Rapid thermal annealing; Semiconductor process modeling; Silicon; Size measurement; Taxonomy; Temperature; Testing; Transmission electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
Type :
conf
Filename :
1505459
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=440216
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