DocumentCode
440223
Title
Investigation of Stress in STI using UV-Raman Spectroscopy
Author
Dombrowski, K.F. ; Dietrich, B. ; De Wolf, I. ; Rooyackers, R. ; Badenes, G.
Author_Institution
IHP, Frankfurt/Oder, Germany
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
196
Lastpage
199
Keywords
Compressive stress; Laser excitation; Phonons; Plasma measurements; Raman scattering; Silicon; Spectroscopy; Stress measurement; Tensile stress; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505473
Link To Document