Co-Silicide Junction Leakage and Device Characteristics in Embedded DRAM with Stack Capacitor Structure

Author

Kim, Jong-Chaen ; Lee, Wook-Ha ; Kim, Jin-Gu ; Chung, Shin-Young ; Nam, Jeong-Suk ; Lee, Jong-Lim ; Kim, Hongseog ; Song, Duheon

Author_Institution

LG Semicon Co. Ltd., Cheongju, Korea

Volume

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

228

Lastpage

231

Keywords

Capacitors; Degradation; Dielectric materials; Diodes; Heat treatment; Leakage current; Logic arrays; MOSFETs; Random access memory; Silicides;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

Filename

1505481

Link To Document