DocumentCode
440242
Title
Evaluation of Room Temperature Wafer Bonding by Fabrication of a GaAs/Pt/Si Metal Base Transistor
Author
Dessein, K. ; Németh, S. ; Vlutters, R. ; Delaey, L. ; De Boeck, J. ; Borghs, G.
Author_Institution
IMEC, Leuven, Belgium
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
280
Lastpage
283
Keywords
Electrons; Fabrication; Gallium arsenide; Magnetic devices; Magnetic multilayers; Schottky barriers; Sputtering; Substrates; Temperature sensors; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505494
Link To Document