Title :
Full Characterization and Long-Term Stability of Standard CMOS Materials for Integrated Micromechanical Applications
Author :
Kapels, H. ; Hierold, C. ; Maier-Schneider, D. ; Schneider, R.
Author_Institution :
Infineon Technologies, Munich, Germany
Keywords :
Acceleration; Acoustic waves; Aluminum; Bridge circuits; Micromechanical devices; Plasma accelerators; Plasma measurements; Plasma temperature; Residual stresses; Stability;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
